Mass-spectrometer-based helium leak detection is widely recognized for its sensitivity, safety, and real-time detection capabilities, making it a standard method used across various industries. However, since the beginning of 2022, the global helium market has encountered a significant challenge dubbed 'Helium Shortage 4.0,' resulting in rationing and a dramatic increase in prices (over 400%).
Major economies, including the United States, the European Union, and China, have classified helium as a critical material due to the risks associated with supply shortages and its irreplaceable role in semiconductor manufacturing, medical imaging, and aerospace applications.
Despite its advantages, helium leak detection has notable drawbacks. The method can be slow and complex, may lack accuracy, and can produce false positives due to excessive sensitivity. Additionally, the equipment required for leak detection is complex and expensive, which highlights the need for alternative solutions.
Since mid-2019, Nova Fabrica has offered Self-Plasma Optical Emission Spectroscopy (SPOES)-based Residual Gas Analyzers (RGAs). These devices can detect various types of leaks, including air, water, and outgassing, in vacuum systems in real-time, operating in both online process mode and spray-checking modes. SPOES utilizes optical emissions from a plasma cell and allows for the use of readily available argon instead of helium for leak checking.
SPOES RGAs are effective across a wide pressure range, typically from 7.5E -7 Torr to 0.75 Torr. Their robust and compact design ensures low maintenance and high reliability, even in demanding environments.
This presentation explores the principles of SPOES and highlights its advantages in detecting leaks using the argon spray method. Practical examples illustrate the working principles and demonstrate significant improvements in usability, speed of leak detection, and accuracy in locating leaks - all without using helium in the process.